Sulphur Hexafluoride CAS: 2551-62-4 SF6 99.999% 5N High-Purity Electronic Special Gas
Product
Usage
Sulphur Hexafluoride is a colorless, odorless, non-toxic, non-flammable inert gas with a
molecular weight of 146.07, a melting point of -51°C, and a boiling
point of -64°C. The
molecular structure of sulfur hexafluoride is arranged in an
octahedron, the bonding distance is small, and the bonding energy is
high, so its stability is high. Electronic grade high-purity sulfur hexafluoride is an ideal etchant. Sulphur Hexafluoride can be used to etch the surface of silicon and remove organic or
inorganic membranes on semiconductor materials, and can be used in the
manufacture of optical fibers.
Quality Specification
Items
Units
Index
(SF6)Sulfur
hexafluoride
Vol./%
≥99.999%…